 |
A Raman spectroscopy study on differently deposited DLC layers in pulse arc system
Ižák, Tibor, Marton, Marián, Vojs, Marián, Redhammer, Robert, Varga, Marián and Veselý, Marián A Raman spectroscopy study on differently deposited DLC layers in pulse arc system Chemical Papers, Vol.64, No. 1, 2010, 46-50
|
|
|
Document type:
|
Článok z časopisu / Journal Article |
|
Collection:
|
Chemical papers
|
|
| Author(s) |
Ižák, Tibor
Marton, Marián
Vojs, Marián
Redhammer, Robert
Varga, Marián
Veselý, Marián
|
| Title |
A Raman spectroscopy study on differently deposited DLC layers in pulse arc system
|
| Journal name |
Chemical Papers
|
| Publication date |
2010
|
| Year available |
2010
|
| Volume number |
64
|
| Issue number |
1
|
| ISSN |
0366-6352
|
| Start page |
46
|
| End page |
50
|
| Place of publication |
Poland
|
| Publisher |
Versita
|
| Collection year |
2010
|
| Language |
english
|
| Subject |
250000 Chemical Sciences
250100 Physical Chemistry (incl. Structural)
|
| Abstract/Summary |
This study is focused on Raman spectroscopy investigations of differently deposited diamond-like carbon (DLC) layers due to varying: (i) Ar and/or N2 flow rate, (ii) number of impulses, and (iii) bias voltage during the growth process. Samples were prepared by a physical vapor deposition method in a pulse arc system. It is shown that Ar and N2 flow rates as well as the bias voltage influence the morphology and chemical composition of the deposited DLC layers. By changing the number of impulses, the number of carbon atoms sputtered from target in the vacuum chamber changes, which is reflected in the thickness and morphology of the DLC layers. Visible light Raman spectroscopy of 632 nm excitation wavelength was used for deep analysis of the deposited layers.
|
|
|
